| MECHANICAL | |
| Linear scales | Self-adhesive mounted stainless steel tape scale with periodo of 20µm |
| Accuracy | ± 3µm/m; ± 5µm/m |
| Resolution | 1 µm, 0.5 µm, 0.1 µm, 0.05 µm, 0.02 µm |
| Output signal | TTL |
| Maximum frequency | 10 MHz |
| Maximum traversing speed | Depends on resolution: 1 µm - < 600 m/min, 0.5 µm - < 600m/min, 0.1 µm - < 240m/min, 0.05 µm - < 120 m/min, 0.02 µm - <42 m/min |
| Sub-divisional error | <40nm |
| Optical reference mark | Selectable with magnets every 50 mm |
| Limits | Magnetic limit switch sensor |
| Storage temperature | -20...+70⁰C |
| Operating temperature | -5°C … 70°C |
| Vibration | 100 m/s2 (55Hz to 2000 Hz) IEC 60068-2-6 |
| Shock | 500 m/s2 (11 ms) IEC 60068-2-27 |
| Degree of protection | IP 40 |
| Accuracy grade | ± 5 μm/m |
| Weight | 0.17 kg + 0.025 kg/m |
| ELECTRICAL | |
| Cable length | < 50 m |
| Supply voltage | 5V ±5%, <150 mA |
| Electrical connection | Cable standard: 1 m or 3 m with 15-pin D-sub connector (male) |